#TMAwater
This #JAP2005 is "part of the #ALDep review series" posted before, cited >2000 times. doi.org/10.1063/1.19... 🧪

Here e.g. #VPHA #ALDep history work foundations were laid and those of #AtomicLimits #ALDdatabase periodic table; #TMAwater surface chemistry studies mapped; term GPC justified, & more.
January 2, 2025 at 1:18 PM
Attending the WALP workshop on #ALDep & #ALEtch- very interesting & cozy event, my talk on #ALDconformality soon. warwick.ac.uk/fac/sci/chem...

Student approached to thank for the #JAP2005 #TMAwater review, which has helped him into ALD field. This happens occasionally & always makes my day!
Warwick Atomic Layer Processing (WALP) 2025
warwick.ac.uk
July 23, 2025 at 10:36 AM